Real-time fab-wide fault detection and classification / Statistical Process Control for Process and Metrology Data

About eFDC / eSPC

Equipment Fault Detection and Classification / Equipment Statistical Process Control on PeakPerformance™Framework

In today’s competitive environment, manufacturers are constantly looking for opportunities to reduce costs and to increase profitability. Early detection of potential production issues is one of the most effective ways to achieving these goals. Timely detection of faults does not only help to reduce scrap, it also helps to increase production quality and yield.

PeakPerformance™ eFDC (equipment Fault Detection and Classification) is designed to provide advanced capabilities to monitor the health of production equipment so unexpected downtime can be avoided. The software collects and analyze process and equipment data in real time allowing timely notification of any issues so they can be addressed quickly and efficiently. As a result, production yield can be maximized and product quality is improved.

Working in conjunction with the eFDC product, PeakPerformance™ eSPC (equipment Statistical Process control) is a powerful analytic engine that enables analysis of process data and real-time recognition and classification of process faults. The eSPC solution, with powerful features such as automatic generation of new SPC models and automatic tuning of SPC models, adapts to the changing FDC needs of your production. This allows engineers to spend less time on maintaining the FDC system and more time on critical tasks.

Key Features

Real-time fault detection with Advanced SPC Models

Integrated monitoring of equipment and manufacturing process in real-time using SPC rules or other advanced algorithms including MVA (i.e.: Hotelling T2 and PCA)

Auto Generation of SPC Model

SPC Models can be automatically generated for new process or recipe based on a customer defined model template

Auto Tuning of SPC Model

SPC control limits are automatically adjusted in response to shifts due to new process context

Interdiction Management

Ability to set up interdiction policies to automate corrective actions

Configurable Visualization and Easy Reporting

Intuitive reporting allows information to be visualized the way you want it