Overview

Dynamic Fault Detection(DFD)

Next Generation Real-time Monitoring Solution


Real-time full sensor trace analysis on all sensors


No limit modeling required


False alarm reduction by more than 10X

Full Sensor Trace Fault Detection
Real-time Notification of Sensor Alarms

Effortless Analysis – Alarm Summary Dashboard

Use Cases

Comprehensive Fault Detection

Use Case 01
Full Sensor Trace Coverage

Process: Etching       Parameter: HE_Flow

Use Case 02
Detection of Subtle Issues

Process: Lithography      Parameter: Resist Bake Plate Temperature

Resources

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