Solution
Chamber Matching (CM)
Maximizing a Fleet to Ensure High Yield

Automatically identifies best chamber

Full trace analysis on all sensors

Time-based chamber analysis made easy

Can compare an unlimited number of chambers

Take a closer look

Detailed Chamber Comparison
as Easy as 1,2,3
STEP 1
Load Full Trace FDC data from corresponding process and chambers
STEP 2
Select chamber reference type: Manual or Automatic
STEP 3
Run Analysis
RESULTS IN MINUTES
Comprehensive Trace-level Result for each parameter
Use Case 01
Fleet Chamber Comparison

MULTI-CHAMBER ANALISYS
CM can analyze multiple chambers simultaneously which greatly simplifies the chamber comparison process
REFERENCE CHAMBER
Reference chamber can be automatically selected or manually assigned
CHAMBER COMPARISON
results from the best matched chamber to the worst
COMPARISON BY PARAMETERS AT A GLANCE
Trace data for selected parameter are overlaid and color coded by chamber