Solution
Chamber Matching (CM)
Maximizing a Fleet to Ensure High Yield
Automatically identifies best chamber
Full trace analysis on all sensors
Time-based chamber analysis made easy
Can compare an unlimited number of chambers
Take a closer look
Detailed Chamber Comparison
as Easy as 1,2,3
STEP 1
Load Full Trace FDC data from corresponding process and chambers
STEP 2
Select chamber reference type: Manual or Automatic
STEP 3
Run Analysis
RESULTS IN MINUTES
Comprehensive Trace-level Result for each parameter
Use Case 01
Fleet Chamber Comparison
MULTI-CHAMBER ANALISYS
CM can analyze multiple chambers simultaneously which greatly simplifies the chamber comparison process
REFERENCE CHAMBER
Reference chamber can be automatically selected or manually assigned
CHAMBER COMPARISON
results from the best matched chamber to the worst
COMPARISON BY PARAMETERS AT A GLANCE
Trace data for selected parameter are overlaid and color coded by chamber
Use Case 02
Time-based Chamber Performance Analysis
Use Case 02
Time-based Chamber Performance Analysis
Use Case 02
Time-based Chamber Performance Analysis
Resource
Product Brochure BISTel Chamber Matching
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