Solution
Chamber Matching (CM)

Maximizing a Fleet to Ensure High Yield

Automatically identifies best chamber

Full trace analysis on all sensors

Time-based chamber analysis made easy

Can compare an unlimited number of chambers

Take a closer look

Detailed Chamber Comparison
as Easy as 1,2,3

STEP 1

Load Full Trace FDC data from corresponding process and chambers

STEP 2

Select chamber reference type: Manual or Automatic

STEP 3

Run Analysis

RESULTS IN MINUTES

Comprehensive Trace-level Result for each parameter

Use Case 01

Fleet Chamber Comparison

MULTI-CHAMBER ANALISYS

CM can analyze multiple chambers simultaneously which greatly simplifies the chamber comparison process

REFERENCE CHAMBER

Reference chamber can be automatically selected or manually assigned

CHAMBER COMPARISON

results from the best matched chamber to the worst

COMPARISON BY PARAMETERS AT A GLANCE

Trace data for selected parameter are overlaid and color coded by chamber

Use Case 02

Time-based Chamber Performance Analysis

Use Case 02

Time-based Chamber Performance Analysis

Use Case 02

Time-based Chamber Performance Analysis

Resource
Product Brochure BISTel Chamber Matching
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