Advanced Data Analytics Platform Improves Yield and Quality with Quick and Accurate Root Cause Analysis
Integration of various data sources into a central database
Automatically detect and classify wafer map patterns
Effortless mining of large datasets
Thorough root cause analysis utilizing full sensor trace
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Best-in-class Root Cause Analysis
Map Analyzer | MA
• Automatic grouping of wafer patterns
• Ranking of patterns based on yield impact, pattern size, etc.
• No pre-defined pattern library required
IntelliMine | IM
• Analyze quality issues using various types of data (e.g.: Yield, Etest, Metrology, Defect, etc.)
• Select the best algorithm for analysis automatically
• Streamline probable causes to improve engineer’s efficiency
Trace Analyzer | TA
• Comprehensive detection of any abnormalities on sensor traces, no matter how subtle
• Pinpoint root causes down to recipe step level
• Significant reduction in root cause analysis time
Edge Patch Open/Short Failure Use Case
Product Brochure BISTel eDataLyzer
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