Solution
eDataLyzer
Advanced Data Analytics Platform Improves Yield and Quality with Quick and Accurate Root Cause Analysis
Integration of various data sources into a central database
Automatically detect and classify wafer map patterns
Effortless mining of large datasets
Thorough root cause analysis utilizing full sensor trace
Take a closer look
Best-in-class Root Cause Analysis
Map Analyzer | MA
• Automatic grouping of wafer patterns
• Ranking of patterns based on yield impact, pattern size, etc.
• No pre-defined pattern library required
IntelliMine | IM
• Analyze quality issues using various types of data (e.g.: Yield, Etest, Metrology, Defect, etc.)
• Select the best algorithm for analysis automatically
• Streamline probable causes to improve engineer’s efficiency
Trace Analyzer | TA
• Comprehensive detection of any abnormalities on sensor traces, no matter how subtle
• Pinpoint root causes down to recipe step level
• Significant reduction in root cause analysis time
Use Case
Edge Patch Open/Short Failure Use Case
The Issue
2 wafer lots suffered edge patch power short and scan failure at the 5 and 11 o’clock position
The Analysis
Accurately Pinpointing Root Causes in Minutes
The Results
Exact Root Cause Identified in Minutes
eDataLyzer helped to quickly and accurately pinpoint the root cause of the wafer edge yield loss issue (from potentially days to minutes)
Identified Critical Yield-impacting Parameters
The solution enabled the engineer to uncover a key unmonitored parameter to be added to the critical parameter list
Minimal Resource Required
One single engineer performed the entire root cause analysis, no additional domain resources required