Solution
Dynamic Fault Detection (DFD)
Next-Generation Fault Detection Offers Full Trace Analysis Overcoming
the Limitations of Legacy FDC Systems
Real-time full sensor trace analysis on all sensors
No limit modeling required
False alarm reduction by more than 10X
Take a closer look 01
Full Sensor Trace Fault Detection
Traditional FDC
Typical FDC systems summarize trace data at certain recipe steps : average, min, max, std dev, range, etc.
BISTel DFD (Dynamic Fault Detection)
Sensor trace data has a wealth of information, containing many nuances and details of a process that could help identify subtle yield or tool issues
Take a closer look 02
Effortless Analysis
Alarm Summary to Trace Results are Just One Click Away
Use Case
Comprehensive Fault Detection
CASE 01
Full Sensor Trace Coverage
Equipment : Etcher / Process : BE / Parameter : He_Flow
Traditional FDC
SPC limits were set up to monitor recipe step 3, NO ALARMS were triggered during this process
BISTel DFD (Dynamic Fault Detection)
By examining the full sensor trace, DFD was able to identify issues in all recipe steps and execute the appropriate alarms
CASE 02
Detection of Subtle Issues
Process: Lithography Parameter: Resist Bake Plate Temperaturev
Traditional FDC
A. Abnotmal tmepreature profile for wafers #14, # 15, #16
B. Wafers passed SPC Limits
BISTel DFD (Dynamic Fault Detection)
DFD easily identified the abnormality using trace analysis
Resource
Product Brochure BISTel Dynamic Fault Detection
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